MBE Components / Systems

MBE Komponenten has more than 50 years of combined MBE industry experience in the design, fabrication and use of effusion, evaporation, sublimation and gas sources. In addition, a wide range of crucibles and ancillary parts are available or can be produced for standard and modified MBE machines and equipment.


  • Effusion Cells
  • Valved Sources
  • Electron Beam Evaporators
  • Dopant Sources
  • Gas Sources
  • Crucibles
  • Power Supplies
  • Substrate Manipulators
Effusion Cells
Components for molecular beam epitaxy effusion cells
Standard Effusion Cell – WEZ Organic Material Effusion Cell – OME
Mini Effusion Cell – MEZ High Temperature Effusion Cell – HTEZ
Production Effusion Cell – PEZ High Temperature Source – HTS
Low Temperature Effusion Cell – NTEZ Oxygen Resistant Effusion Cell – OREZ


Valved Sources
   
Valved GaP Compound Source – VGCS Valved Arsenic Cracker Source – VACS


Electron Bean Evaporators
Standard E-Beam Evaporator – EBV Vertical E-Beam Evaporator – EBVV
Multi-Pocket E-Beam Evaporator – EBVM HV Power Supplies for EBV Series


Dopant Sources
Silicon Sublimation Source – SUSI Dual Dopant Source – DCS
Carbon Sublimation Source – SUKO


Dopant Source Sources
Gallium Phosphide Cubes – 6N Pure Monocrystalline Silicon – >1000 Ohm/cm
Single Crystal, 0.5g Shaped to fit customer’s crucibles, 2cc – 500cc


Gas Sources
Hydrogen Atom Beam Source – HABS Gas Cracker Cell – GRZ
Hydrogen Cracker Source – HCS Thermal Gas Injector – TGI


MBE / UHV Systems
   
Research MBE Systems In-Situ Etching Systems – ISES


Equipment
Substrate Manipulator – SH Cross Beam Ionizer – CBI
Power Supply, Temperature Control – PS Shutter Control Unit – SCU
Thermocouples – TC Shutter – S
Cables and Connectors – CA Sof Acting Rotary Shutter Module – RSM
Manipulator Control Unit – MCU Soft Acting Linear Shutter Module – LSM
Cryopump Valve Control Unit – CVCU Magnetic Rotary Feedthrough – MRD
Beam Flux Monitor – BFM Viewport Shutter – FSH
Cooling Shroud – CS Crucibles – CRU

Valved Sources
Components for molecular beam epitaxy effusion cells
Standard Effusion Cell – WEZ Organic Material Effusion Cell – OME
Mini Effusion Cell – MEZ High Temperature Effusion Cell – HTEZ
Production Effusion Cell – PEZ High Temperature Source – HTS
Low Temperature Effusion Cell – NTEZ Oxygen Resistant Effusion Cell – OREZ


Valved Sources
   
Valved GaP Compound Source – VGCS Valved Arsenic Cracker Source – VACS


Electron Bean Evaporators
Standard E-Beam Evaporator – EBV Vertical E-Beam Evaporator – EBVV
Multi-Pocket E-Beam Evaporator – EBVM HV Power Supplies for EBV Series


Dopant Sources
Silicon Sublimation Source – SUSI Dual Dopant Source – DCS
Carbon Sublimation Source – SUKO


Dopant Source Sources
Gallium Phosphide Cubes – 6N Pure Monocrystalline Silicon – >1000 Ohm/cm
Single Crystal, 0.5g Shaped to fit customer’s crucibles, 2cc – 500cc


Gas Sources
Hydrogen Atom Beam Source – HABS Gas Cracker Cell – GRZ
Hydrogen Cracker Source – HCS Thermal Gas Injector – TGI


MBE / UHV Systems
   
Research MBE Systems In-Situ Etching Systems – ISES


Equipment
Substrate Manipulator – SH Cross Beam Ionizer – CBI
Power Supply, Temperature Control – PS Shutter Control Unit – SCU
Thermocouples – TC Shutter – S
Cables and Connectors – CA Sof Acting Rotary Shutter Module – RSM
Manipulator Control Unit – MCU Soft Acting Linear Shutter Module – LSM
Cryopump Valve Control Unit – CVCU Magnetic Rotary Feedthrough – MRD
Beam Flux Monitor – BFM Viewport Shutter – FSH
Cooling Shroud – CS Crucibles – CRU

Electron Beam Evaporators
Components for molecular beam epitaxy effusion cells
Standard Effusion Cell – WEZ Organic Material Effusion Cell – OME
Mini Effusion Cell – MEZ High Temperature Effusion Cell – HTEZ
Production Effusion Cell – PEZ High Temperature Source – HTS
Low Temperature Effusion Cell – NTEZ Oxygen Resistant Effusion Cell – OREZ


Valved Sources
   
Valved GaP Compound Source – VGCS Valved Arsenic Cracker Source – VACS


Electron Bean Evaporators
Standard E-Beam Evaporator – EBV Vertical E-Beam Evaporator – EBVV
Multi-Pocket E-Beam Evaporator – EBVM HV Power Supplies for EBV Series


Dopant Sources
Silicon Sublimation Source – SUSI Dual Dopant Source – DCS
Carbon Sublimation Source – SUKO


Dopant Source Sources
Gallium Phosphide Cubes – 6N Pure Monocrystalline Silicon – >1000 Ohm/cm
Single Crystal, 0.5g Shaped to fit customer’s crucibles, 2cc – 500cc


Gas Sources
Hydrogen Atom Beam Source – HABS Gas Cracker Cell – GRZ
Hydrogen Cracker Source – HCS Thermal Gas Injector – TGI


MBE / UHV Systems
   
Research MBE Systems In-Situ Etching Systems – ISES


Equipment
Substrate Manipulator – SH Cross Beam Ionizer – CBI
Power Supply, Temperature Control – PS Shutter Control Unit – SCU
Thermocouples – TC Shutter – S
Cables and Connectors – CA Sof Acting Rotary Shutter Module – RSM
Manipulator Control Unit – MCU Soft Acting Linear Shutter Module – LSM
Cryopump Valve Control Unit – CVCU Magnetic Rotary Feedthrough – MRD
Beam Flux Monitor – BFM Viewport Shutter – FSH
Cooling Shroud – CS Crucibles – CRU

Dopant Sources
Components for molecular beam epitaxy effusion cells
Standard Effusion Cell – WEZ Organic Material Effusion Cell – OME
Mini Effusion Cell – MEZ High Temperature Effusion Cell – HTEZ
Production Effusion Cell – PEZ High Temperature Source – HTS
Low Temperature Effusion Cell – NTEZ Oxygen Resistant Effusion Cell – OREZ


Valved Sources
   
Valved GaP Compound Source – VGCS Valved Arsenic Cracker Source – VACS


Electron Bean Evaporators
Standard E-Beam Evaporator – EBV Vertical E-Beam Evaporator – EBVV
Multi-Pocket E-Beam Evaporator – EBVM HV Power Supplies for EBV Series


Dopant Sources
Silicon Sublimation Source – SUSI Dual Dopant Source – DCS
Carbon Sublimation Source – SUKO


Dopant Source Sources
Gallium Phosphide Cubes – 6N Pure Monocrystalline Silicon – >1000 Ohm/cm
Single Crystal, 0.5g Shaped to fit customer’s crucibles, 2cc – 500cc


Gas Sources
Hydrogen Atom Beam Source – HABS Gas Cracker Cell – GRZ
Hydrogen Cracker Source – HCS Thermal Gas Injector – TGI


MBE / UHV Systems
   
Research MBE Systems In-Situ Etching Systems – ISES


Equipment
Substrate Manipulator – SH Cross Beam Ionizer – CBI
Power Supply, Temperature Control – PS Shutter Control Unit – SCU
Thermocouples – TC Shutter – S
Cables and Connectors – CA Sof Acting Rotary Shutter Module – RSM
Manipulator Control Unit – MCU Soft Acting Linear Shutter Module – LSM
Cryopump Valve Control Unit – CVCU Magnetic Rotary Feedthrough – MRD
Beam Flux Monitor – BFM Viewport Shutter – FSH
Cooling Shroud – CS Crucibles – CRU

Gas Sources
Components for molecular beam epitaxy effusion cells
Standard Effusion Cell – WEZ Organic Material Effusion Cell – OME
Mini Effusion Cell – MEZ High Temperature Effusion Cell – HTEZ
Production Effusion Cell – PEZ High Temperature Source – HTS
Low Temperature Effusion Cell – NTEZ Oxygen Resistant Effusion Cell – OREZ


Valved Sources
   
Valved GaP Compound Source – VGCS Valved Arsenic Cracker Source – VACS


Electron Bean Evaporators
Standard E-Beam Evaporator – EBV Vertical E-Beam Evaporator – EBVV
Multi-Pocket E-Beam Evaporator – EBVM HV Power Supplies for EBV Series


Dopant Sources
Silicon Sublimation Source – SUSI Dual Dopant Source – DCS
Carbon Sublimation Source – SUKO


Dopant Source Sources
Gallium Phosphide Cubes – 6N Pure Monocrystalline Silicon – >1000 Ohm/cm
Single Crystal, 0.5g Shaped to fit customer’s crucibles, 2cc – 500cc


Gas Sources
Hydrogen Atom Beam Source – HABS Gas Cracker Cell – GRZ
Hydrogen Cracker Source – HCS Thermal Gas Injector – TGI


MBE / UHV Systems
   
Research MBE Systems In-Situ Etching Systems – ISES


Equipment
Substrate Manipulator – SH Cross Beam Ionizer – CBI
Power Supply, Temperature Control – PS Shutter Control Unit – SCU
Thermocouples – TC Shutter – S
Cables and Connectors – CA Sof Acting Rotary Shutter Module – RSM
Manipulator Control Unit – MCU Soft Acting Linear Shutter Module – LSM
Cryopump Valve Control Unit – CVCU Magnetic Rotary Feedthrough – MRD
Beam Flux Monitor – BFM Viewport Shutter – FSH
Cooling Shroud – CS Crucibles – CRU

Crucibles
Components for molecular beam epitaxy effusion cells
Standard Effusion Cell – WEZ Organic Material Effusion Cell – OME
Mini Effusion Cell – MEZ High Temperature Effusion Cell – HTEZ
Production Effusion Cell – PEZ High Temperature Source – HTS
Low Temperature Effusion Cell – NTEZ Oxygen Resistant Effusion Cell – OREZ


Valved Sources
   
Valved GaP Compound Source – VGCS Valved Arsenic Cracker Source – VACS


Electron Bean Evaporators
Standard E-Beam Evaporator – EBV Vertical E-Beam Evaporator – EBVV
Multi-Pocket E-Beam Evaporator – EBVM HV Power Supplies for EBV Series


Dopant Sources
Silicon Sublimation Source – SUSI Dual Dopant Source – DCS
Carbon Sublimation Source – SUKO


Dopant Source Sources
Gallium Phosphide Cubes – 6N Pure Monocrystalline Silicon – >1000 Ohm/cm
Single Crystal, 0.5g Shaped to fit customer’s crucibles, 2cc – 500cc


Gas Sources
Hydrogen Atom Beam Source – HABS Gas Cracker Cell – GRZ
Hydrogen Cracker Source – HCS Thermal Gas Injector – TGI


MBE / UHV Systems
   
Research MBE Systems In-Situ Etching Systems – ISES


Equipment
Substrate Manipulator – SH Cross Beam Ionizer – CBI
Power Supply, Temperature Control – PS Shutter Control Unit – SCU
Thermocouples – TC Shutter – S
Cables and Connectors – CA Sof Acting Rotary Shutter Module – RSM
Manipulator Control Unit – MCU Soft Acting Linear Shutter Module – LSM
Cryopump Valve Control Unit – CVCU Magnetic Rotary Feedthrough – MRD
Beam Flux Monitor – BFM Viewport Shutter – FSH
Cooling Shroud – CS Crucibles – CRU

Power Supplies
Components for molecular beam epitaxy effusion cells
Standard Effusion Cell – WEZ Organic Material Effusion Cell – OME
Mini Effusion Cell – MEZ High Temperature Effusion Cell – HTEZ
Production Effusion Cell – PEZ High Temperature Source – HTS
Low Temperature Effusion Cell – NTEZ Oxygen Resistant Effusion Cell – OREZ


Valved Sources
   
Valved GaP Compound Source – VGCS Valved Arsenic Cracker Source – VACS


Electron Bean Evaporators
Standard E-Beam Evaporator – EBV Vertical E-Beam Evaporator – EBVV
Multi-Pocket E-Beam Evaporator – EBVM HV Power Supplies for EBV Series


Dopant Sources
Silicon Sublimation Source – SUSI Dual Dopant Source – DCS
Carbon Sublimation Source – SUKO


Dopant Source Sources
Gallium Phosphide Cubes – 6N Pure Monocrystalline Silicon – >1000 Ohm/cm
Single Crystal, 0.5g Shaped to fit customer’s crucibles, 2cc – 500cc


Gas Sources
Hydrogen Atom Beam Source – HABS Gas Cracker Cell – GRZ
Hydrogen Cracker Source – HCS Thermal Gas Injector – TGI


MBE / UHV Systems
   
Research MBE Systems In-Situ Etching Systems – ISES


Equipment
Substrate Manipulator – SH Cross Beam Ionizer – CBI
Power Supply, Temperature Control – PS Shutter Control Unit – SCU
Thermocouples – TC Shutter – S
Cables and Connectors – CA Sof Acting Rotary Shutter Module – RSM
Manipulator Control Unit – MCU Soft Acting Linear Shutter Module – LSM
Cryopump Valve Control Unit – CVCU Magnetic Rotary Feedthrough – MRD
Beam Flux Monitor – BFM Viewport Shutter – FSH
Cooling Shroud – CS Crucibles – CRU

Substrate Manipulators
Components for molecular beam epitaxy effusion cells
Standard Effusion Cell – WEZ Organic Material Effusion Cell – OME
Mini Effusion Cell – MEZ High Temperature Effusion Cell – HTEZ
Production Effusion Cell – PEZ High Temperature Source – HTS
Low Temperature Effusion Cell – NTEZ Oxygen Resistant Effusion Cell – OREZ


Valved Sources
   
Valved GaP Compound Source – VGCS Valved Arsenic Cracker Source – VACS


Electron Bean Evaporators
Standard E-Beam Evaporator – EBV Vertical E-Beam Evaporator – EBVV
Multi-Pocket E-Beam Evaporator – EBVM HV Power Supplies for EBV Series


Dopant Sources
Silicon Sublimation Source – SUSI Dual Dopant Source – DCS
Carbon Sublimation Source – SUKO


Dopant Source Sources
Gallium Phosphide Cubes – 6N Pure Monocrystalline Silicon – >1000 Ohm/cm
Single Crystal, 0.5g Shaped to fit customer’s crucibles, 2cc – 500cc


Gas Sources
Hydrogen Atom Beam Source – HABS Gas Cracker Cell – GRZ
Hydrogen Cracker Source – HCS Thermal Gas Injector – TGI


MBE / UHV Systems
   
Research MBE Systems In-Situ Etching Systems – ISES


Equipment
Substrate Manipulator – SH Cross Beam Ionizer – CBI
Power Supply, Temperature Control – PS Shutter Control Unit – SCU
Thermocouples – TC Shutter – S
Cables and Connectors – CA Sof Acting Rotary Shutter Module – RSM
Manipulator Control Unit – MCU Soft Acting Linear Shutter Module – LSM
Cryopump Valve Control Unit – CVCU Magnetic Rotary Feedthrough – MRD
Beam Flux Monitor – BFM Viewport Shutter – FSH
Cooling Shroud – CS Crucibles – CRU


Headquarters

UMC Corporate Headquarters located at 160 Chubb Ave. Suite 206, Lyndhurst, NJ 07071
+1 (201) 507-3300

www.umccorp.com

inquiry@umccorp.com

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